成果報告書詳細
管理番号20110000000246
タイトル*平成22年度中間年報 太陽エネルギー技術研究開発/太陽光発電システム次世代高性能技術の開発/薄膜シリコンフィルム太陽電池の高速製膜技術の研究開発
公開日2011/7/28
報告書年度2010 - 2010
委託先名富士電機ホールディングス株式会社
プロジェクト番号P07015
部署名新エネルギー部
和文要約和文要約等以下本編抜粋:1.共同研究の内容及び成果等 (1)研究の目的と目標 薄膜Si太陽電池であるフレキシブル太陽電池についてその高効率化とともに高速で製膜する技術を開発する。フィルム基板上の薄膜Si太陽電池で次を目標とした。 (1)薄膜シリコン太陽電池の高速製膜技術(中間目標:H24年度) 結晶質Si系単接合セルの変換効率≧9.5%。このとき、製膜速度≧2.0nm/s。 (2)多接合太陽電池の製膜技術(中間目標:H24年度) 多接合セルの変換効率≧14%(初期)or13%(安定化)。このとき、製膜速度≧2.0nm/s(結晶質系)、≧0.67nm/s(非晶質系)。
英文要約Title: R&D of high rate deposition techniques for thin-film silicon solar cells on film substrates (FY2010-FY2012) FY2010 Annual Report
This R&D is aiming at developing the high quality and growth rate deposition and high output modularization techniques for the thin-film silicon solar cells on flexible film substrates. We examined three subjects; 1) High rate deposition techniques of single junction solar cells, 2) Formation techniques of multi-junction solar cells, 3) Production techniques of solar cell modules. We obtained four achievements in this year. 1-1) Microcrystalline silicon (μc-Si) single junction solar cells; we fabricated μc-Si solar cells on plastic film substrates and obtained the cell with the efficiency of 9.5% at growth rate 2.2nm/s of its intrinsic layer. Then one of the two intermediate targets was accomplished. 1-2) Amorphous silicon (a-Si) single junction solar cells; we studied the relations between deposition conditions and growth rates of a-Si thin films and comprehended those that over 0.67nm/s. And an a-Si solar cell deposited on plastic film substrates had the initial efficiency 8.6% at growth rate 0.76nm/s of its intrinsic layer. For further improvement of the efficiency, we are continuing to optimize the deposition conditions. 2) Multi-junction solar cells; we fabricated double and triple junction solar cells on plastic film substrates and obtained the triple junction cell (a-Si/μc-Si/μc-Si) with the stable efficiency 11.7%. The growth rates of a-Si and μc-Si intrinsic layers were 0.3nm/s and 2nm/s respectively. We will apply the high deposition rate a-Si cells, described 1-2), to the multi-junction solar cells and optimize every related layer. 3) Solar cell modules; we produced sub-modules using double junction solar cells (a-Si/μc-Si) on plastic film substrates. And an initial module efficiency value of 9.5% (three series-connected, 53cm^2) has been achieved so far. The output loss of the modularization was estimated to be 20%. We are going to make continuous efforts to reduce the loss.
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