成果報告書詳細
管理番号20110000001266
タイトル*平成22年度中間年報 ナノテク・先端部材実用化研究開発/カーボンナノホーンを用いたフッ素貯蔵材料の研究開発
公開日2011/8/30
報告書年度2010 - 2010
委託先名国立大学法人信州大学 ダイキン工業株式会社 国立大学法人名古屋大学 学校法人名城大学 大陽日酸株式会社
プロジェクト番号P05023
部署名電子・材料・ナノテクノロジー部
和文要約和文要約等以下本編抜粋:1.
研究開発の内容及び成果等
1.1 テーマ概要
本邦で開発されたカーボンナノホーン(CNH)を用い、フッ素ガスを安全に貯蔵・放出できる最適構造のCNHを開発する。最適構造のCNHを用いて、フッ素ガスを安全・簡便・効率的に貯蔵できるデバイスを開発し、供給するシステムを確立する。このデバイス・システムの開発により、半導体、液晶ディスプレイ、太陽電池パネル、MEMS等の製造時のクリーニングガス及びエッチングガスとして、最も性能が高く廃棄物処理費用が極端に少ない上、温暖化係数ゼロであるフッ素ガスを用いることを実現する。
英文要約Objects of the project.: The object of this project is to develop fluorine storage devices using carbon nanohorns (CNHs) as fluorine storage materials. 1. Investigation on optimum CNHs and optimum fluorine adsorption-desorption conditions for fluorine storage in CNHs. TG-DTA studies on various forms of CNHs have revealed that hole-opened debris-free dahlia type CNHs (H2O2-h-CNHs, see section 2) obtained by an oxidation in a H2O2 solution are most suitable for fluorine storage in CNHs. Mass spectroscopic studies on the gas phase taken from fluorinated H2O2-h-CNHs showed that the released gas was of high purity fluorine without fluorocarbon impurities indicating the possible repeated use of the CNHs. 2. Development of daily production of kg-scale fluorinated CNHs with controlled structural properties. Hole-opened H2O2-h-CNHs with controlled structural properties have been available on a kg-scale but they contained the debris formed inside of nanohorns during the oxidation process. A treatment has been developed for effective removal of the debris. Three cycles fluorine adsorption-desorption experiments were carried out for the debris-free H2O2-h-CNHs, and almost 100 % release of adsorbed fluorine was successfully achieved in each cycle. 3. Investigation on optimum structural properties of dahlia and non-dahlia type CNHs for fluorine storage and selective production of several types CNHs. 3.1 Optimal structure parameters for hole-opened dahlia-type CNHs were investigated by using Raman, XRD and TG, and the samples were standardized. Such standardized hole-opened CNHs (Raman ratio D/G > 2.1, purity > 85 % and no amorphous contamination) were used for mg to 100 mg scale of fluorine adsorption-desorption experiments. C-C bond length of fluorinated CNHs were analyzed by using XRD and the structure of de-fluorinated CNH was recovered to the original one, suggesting the reversible reaction. 3.2 We have established preparation conditions for controlling size and morphology of CNHs and made a patent application for this result. Based on the patent, we made a new prototype CNH production apparatus for collecting information necessary for building a new CNH mass-production equipment. Moreover, we investigated an efficient CNH product transfer method from a CNH production chamber to a CNH collecting container. As a result, we confirmed that a CNH product transfer efficiency has improved up to 90 wt% from several wt% for the existing system. 4. Prototype apparatus for the storage and the supply of fluorine. A prototype apparatus for the storage and the supply of fluorine have been designed based on required specification based on fluorine desorption behavior of fluorinated CNHs, and parts for the apparatus have been prepared. A gas analysis system equipped with FT- IR and UV spectrometers have also been ready for the examination of the purity of released fluorine from the fluorine storage device in which fluorinated CNHs are charged.
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