成果報告書詳細
管理番号20110000001174
タイトル*平成22年度中間年報 ナノテク・先端部材実用化研究開発/表面ナノ機能修飾した樹脂成形用型部材の開発
公開日2011/9/9
報告書年度2010 - 2010
委託先名TOWA株式会社 日東電工株式会社 財団法人ファインセラミックスセンター
プロジェクト番号P05023
部署名電子・材料・ナノテクノロジー部
和文要約和文要約等以下本編抜粋:1.研究開発の内容及び成果等
(1)表面機能層の創製(担当:TOWA)
H22年度は、H21度に確立したコーティング原料の合成プロセスを基に、ジルコニア基セラミックス基板に製膜が可能な表面機能層を合成する化学プロセスを確立した。さらに、研究開発項目(4)にて得られた高離型性に関する材料設計指針に基づき、以下の二つの手法により表面機能層中へのドーパント(カチオン、アニオン)の導入を検討した。
i)カチオンドーパントとアニオンドーパントを含むコーティング原料を使用する方法ii)カチオンドーパントのみを含むコーティング原料を用いて表面機能層を製膜した後、アニオンドーパントを導入する方法
その結果、i)においては、複数のドーパント成分を含むコーティング原料を合成し、セラミックス基板上に均一製膜する新たなプロセスを確立した。また、ii)においては、セラミックス基板上にカチオンドーパントのみを含む表面機能層を付与した後、アニオンドーパント成分を含む雰囲気中において表面機能層側を所定時間処理することで、表面機能層中へのアニオンドーパントの導入を検討した。さらに、表面機能層への水分子吸着挙動(樹脂分子の吸着活性点として作用)、および、水分子吸着表面へのモデル樹脂分子の吸着挙動を評価検討した。
英文要約Resin molding compounds (RMCs) are used for electronic packaging and are designed to strongly adhere to electronic components. However, there tends to be a high release force between RMCs and encapsulation mold surfaces. Consequently, mold surfaces need to be frequently cleaned to remove any RMC that adheres to them and they should be simultaneously coated with a mold lubricant. In this project, ceramic mold materials with excellent release and antifouling properties are developed by nanoscale atomic modification of the crystal structures of subsurface layers of materials. The following items were performed in FY2010: (1) A fundamental chemical process for forming a surface modification layer on zirconia-based ceramic substrates was developed by controlling the composition of precursor solutions. Modification of the crystal lattices of the surface layer with cation and anion dopants was investigated using precursor solutions containing both the dopants and by coating a cation-doped layer and subsequently introducing an anion dopant to the layer. (2) A surface modification layer could be uniformly formed on the ceramic substrates by optimizing the spray coating conditions. The obtained surface layer had greatly enhanced mechanical properties such as higher peel and wear resistances. (3) Highly efficient machining techniques for fabricating zirconia-based ceramic molds with complex shapes were established by minimizing the cutting force. “Scanning” electrical discharge machining of the ceramics with an auxiliary electrode was investigated by optimizing the shape of the counter electrode. The ceramic surfaces could be given a satin-like finish with a surface roughness of 1.0-2.0 micron mRa over an area of 25×25 mm2. (4) The releasability of the oxide ceramics, which were model surface modification layers, could be improved by co-doping the crystal lattice with cations and anions. This gave low adhesion strength of below 0.2 MPa. This excellent releasability is due to suppression of dissociative adsorption of water molecules, which are considered to be active sites for adhesion of RMCs. The most stable arrangements of point defects created on introducing dopants into the oxide crystal lattice were determined by an ab-initio method in conjunction with electrostatic calculations. Furthermore, the lattice defects in non-doped and doped oxides were experimentally investigated by positron annihilation spectroscopy. (5) Release agent species in the RMCs that bled onto the surface modification layers were precisely analyzed during molding of RMCs. The dispersion of fouling species strongly depended on the release agent. The wettability of agents on oxide ceramics with excellent releasability was lower than that on the conventional surface layer. Because thermal deterioration of fouling species on the molds eventually results in strong adhesion, the oxide ceramics are considered to have good antifouling properties in addition to excellent releasability.
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