成果報告書詳細
管理番号20110000000747
タイトル*平成22年度中間年報 省エネルギー革新技術開発事業/先導研究/リソグラフィ用ハイブリッドArFレーザシステムの研究開発
公開日2011/10/12
報告書年度2010 - 2010
委託先名ギガフォトン株式会社
プロジェクト番号P09015
部署名エネルギー対策推進部
和文要約和文要約等以下本編抜粋:1. 研究開発の内容及び成果等 (1) 高効率固体オシレータの開発 狭帯域ArFエキシマレーザオシレータの代替として用いる高効率固体オシレータの開発を行った。開発した高効率固体オシレータの構成図を図1に示す。高効率固体オシレータは、6kHz動作高効率チタンサファイアレーザシステム及び非線形結晶であるLBO(LiB3O3)、KBBF(KBe2BO3F2)結晶を用いた高効率波長変換系から構成される。
英文要約The injection locking ArF excimer laser system for 193nm microlithography has a problem that it consumes large electric power because the efficiency of the line-narrowing ArF laser oscillator is very low below 0.1 %. Therefore, we have been developing the hybrid-ArF laser system that consists of a high efficiency solid-state laser oscillator with KBBF of the new nonlinear crystal for 193nm pulse generation and an ArF excimer laser power amplifier. The KBBF has high conversion efficiency in deep-ultra violet (DUV) wavelength region around 193nm.
In FY2010, we have developed a 193nm solid-state laser consisting of a high-efficiency Ti:sapphire laser system operating at 6kHz and a wavelength conversion system with LBO and KBBF nonlinear crystals. We achieved the high efficiency up to 22% in the Ti:sapphire laser system and obtained the average output power of 16W. We also accomplished the high conversion efficiency above 7% in the KBBF at 6 kHz burst-mode operation and obtained 0.2W of the 193nm output power from the KBBF at 6 kHz continuous operation. It transpired that the conversion efficiency in the KBBF saturated for the input average power above 1kW/cm2. It appears that the saturation of the conversion efficiency is caused by the local heat increase in the optical contact surfaces between the KBBF and prisms due to the imperfect optical contact. We are going to reduce the pulse width in Ti:sapphire laser system in order to decrease the input average power density and the input energy density, while maintaining higher input peak power density.
We constructed the line narrowing Ti:sapphire oscillator with longitudinal multimode, and confirmed the longitudinal multimode oscillation. However, it was found that the spectral band width cannot be broadened above 150MHz with Littmann-type laser cavity.
We also developed the optical system with a random phase plate to decrease the spatial coherence below the same level as line-narrowing ArF excimer lasers, and measured much lower visibility with a shearing interferometer at the same share as line-narrowing ArF excimer lasers.
We also developed the optical system for the high efficiency injection to ArF excimer laser amplifier, the measuring system for temporal and spatial coherence. These systems were completed their evaluation tests with the injection locking ArF excimer laser system.
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