成果報告書詳細
管理番号20110000001072
タイトル*平成22年度中間年報 高出力多波長複合レーザー加工基盤技術開発プロジェクト 次世代レーザー加工技術の研究開発(4)
公開日2011/10/12
報告書年度2010 - 2010
委託先名株式会社アルバック
プロジェクト番号P10006
部署名機械システム部
和文要約和文要約等以下本編抜粋:1. 研究開発の内容及び成果等 (1) 高精度大型異形レンズ研磨装置の開発 (ア)アニール用途特有の研磨課題を踏襲したレンズ加工工程管理と加工評価技術を確立する アニールで使用されるレーザービームの光学系には非常に高精度な研磨技術が必要とされる。研磨精度が不十分であるとラインビームの均一性が劣化し、ビーム照射された物体にアニール斑が生じる。TFTなどの薄膜材料をアニール結晶化した場合、このアニール斑はパネルに映る画像の斑となって現れ、画面表示媒体として低質の製品となってしまう。
英文要約Title: Research and development of basic technologies for the high power and advanced laser beam machining. [Development of the combined laser beam machining technologies with multi-wavelength laser beams. / Development of laser surface processing technologies] (FY2010-FY2012) FY2010 Annual Report
(1) The development of the large lens grinding machine. A) Planning: Establishing both the technique to grind a large and high quality lens for laser annealing technology and the method to evaluate the process validity: The highly precise grinding technique is required to obtain the uniformity of the line-beam energy intensity that strongly depends on the quality of the lens. If the quarity of the lens is insufficient, the Low Temperature Poly-Si(LTPS) composed of an annealed amorphous-Si can't show its promised performance, such as uneven screen of display panel. Because the size of the panel of the market has grown, it is necessary to enlarge the lens of the annealer. But there is no lens grinding device that can be processed in large-scale and high accuracy within the country. The development goal for this year is to start the production of the grinder that can correspond to the large-scale lens processing, and it is planned to complete it in the next year. B) Results: In this year, the rough grinding of the large-scale lens was done with the new grinding machine. The fine grinding process will be continued to next year. (2) The development of simulation model of laser optics. A) Planning: The introduction of the new simulation system, and the establishment of the fundamental optical model to calculate the high quality beam. B) Result: The new simulation system was introduced, then the wide, uniform and homogenized beam was calculated by using it. The dimension parameters of the lenses that made a high quality line-beam of laser annealing system were obtained and they have been used to produce some lenses.
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