成果報告書詳細
管理番号20100000002299
タイトル*平成21年度中間年報 新エネルギー技術研究開発/新エネルギーベンチャー技術革新事業(燃料電池・蓄電池)/マイクロフローセンサーパッケージの技術開発
公開日2011/11/26
報告書年度2009 - 2009
委託先名株式会社菊池製作所
プロジェクト番号P10020
部署名研究開発推進部
和文要約和文要約等以下本編抜粋:1. 研究開発の内容及び成果等 株式会社菊池製作所は、家庭用燃料電池普及の為に、燃料電池システム内に複数存在する流量計の性能向上・小型化・低価格化が普及期には必要であると考えた。これらを解決する手段として、Fraunhofer IZM が開発した差圧式のMEMS(Micro electro Mechanical Systems)センサー技術を応用して、液体・気体の両方を同一の原理で計測可能な、小型の流量計を開発した。
(1) マイクロフローセンサーの構造設計と試作 家庭用燃料電池に搭載する、液体/気体流量の両方を同一原理で検出可能な、小型の流量計測装置の開発を、Phase1 フィジビリティースタディとして実施した。センサーパッケージ製作に関しては、流体の導通経路を含んだ流量センサーパッケージの詳細設計(図1)に基づいて、部品試作を行い、半導体プロセス技術で製作された□3mm×t0.36mm の差圧式MEMS センサーを、接着剤等により実装し(図2)、目標である□8×2.0mm の小型パッケージ(図3)を達成した。燃料電池用の流量計ユニットについは、分流構造を前提に
した流路構造に対して、熱流体シミュレーションを実施し、NEDO が策定する「家庭用燃料電池システム関連補機類の共通仕様リスト」に沿って、改質水用流量計ユニット(図4)及び選択酸化空気流量計ユニット(図5)のプロトタイプを製作した。
英文要約Reduction of CO2 in Household is necessary for sustaining the Green Earth. In order to achieve this goal we developed [Sensors] It is essential for improving the performance of a flow meter in the stationary FC system, reduce the cost, and miniaturize it. We used the difference pressure-type MEMS sensor technology that Fraunhofer IZM had and developed the miniaturized flow meter that could measure both liquid and gas with the same principle. 1.Descriptions and Achievements of Research and Development: (1)Designing structure and manufacturing prototypes of micro flow sensor: Our goal for sensor package production was achieved, and as for the flow meter used for stationary FC system, we performed a fluid simulation and manufactured the prototype flow meter that are used 1) water for reforming and 2) air for preferential oxidation of CO. (2)Confirming self-sealing performance effect and finding conditions: As scheduled, we are now certain that sensor chip and flow channel are retained by capillary force when using adhesive with thixotropy, and that, while they are in such a condition, it is possible to apply sealing around. By controlling the shape and height of the downstream flow channel, we confirmed the adhesive could stably seal the channel. (3)Checking output voltage for flow amount: In order to test the sensor package itself, we placed it in temperature and humidity controlled bath. We checked to see any differences in offset voltage and measured output voltage properties for the required flow rate. It turned out that our measurement results are consistent with the theoretical values. For testing the flow meter used for stationary FC system, we only performed an initial evaluation limiting environmental temperature and flow rate range. By the beginning of Phase 2, we are going to perform an additional evaluation to check environmental temperature and different flow rates. (4)Making a business plan: For the fuel cell market including stationary FC system, we drew up a business plan based on the market data and information obtained from individual interviews with prospective manufacturers, patent search, and simulation for business income and expenditure. Data sources for drawing up a detailed business plan are as follows: - Market information: Fuji Keizai Future Outlook for FC Related Technologies and Market: 2010 Vol.1 - Information from interviews: Toshiba Fuel Cell Power Systems Corporation, Panasonic Corporation, Fuji Electric Holdings Co., Ltd., Nidec Copal Electronics Corporation, etc. - Data found from patent search: Patent application data from Industrial Property Digital Library on the Patent Office website. - IP License agreement: we signed a Memorandum of Understanding with Fraunhofer IZM. - Review on business income and expenditure: Taking simulation for business income and expenditure received from NEDO hands-on, we drafted a business proposal.
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