成果報告書詳細
管理番号20100000002301
タイトル*平成21年度中間年報 新エネルギー技術研究開発/新エネルギーベンチャー技術革新事業(太陽光発電)/太陽電池用単結晶シリコン薄膜製造方法の技術開発
公開日2011/11/26
報告書年度2009 - 2009
委託先名株式会社半一 国立大学法人東京大学
プロジェクト番号P10020
部署名研究開発推進部
和文要約和文要約等以下本編抜粋:1. 研究開発の内容、及び成果等 (1) 小面積単結晶シリコン基板の作製 (a) 改良装置の設計・導入 東京大学に現有する急速蒸着装置を用いて実験的検討を進める中で、改良点を明らかにした。一般実験室で実験を行っており基板表面へのパーティクル付着を防止すべく装置全体をクリーンブースで覆い、エピタキシャル成長の膜質改善のため基板をより高圧のH2 雰囲気でアニール処理できる装置を設計し、導入した。その結果、上記項目の改善に加え、35 mm□の基板サイズまで対応可能となった。
英文要約Recently, the market of solar cell has been increasing and then the cost of bulk Si is increasing. In order to decrease the cost of solar cells, we need to reduce the volume of Si for a solar cell.
In this project, we develop a fabrication method of single crystal Si thin film substrate for solar cells using rapid vapor deposition (RVD) method. In the phase I, we have been trying fabrication of a 15×15mm2 single crystal Si thin film and it applies for a Solar cell.
Progress report
1.Fabrication of single crystal Si thin films
Before this project, we could make some pieces of single crystal Si thin film that are several square millimeters. However, the process yield was very low. Because of the etching length are about 500mm, then the Si thin film needs high quality of crystal. In this project, we develop a new structure of substrate, then, the etching length is reduced to a tenth and then the permissible zone of crystal quality is enlarged. Then, we succeed in fabricating 15×15mm2 single crystal Si thin film.
Now we try to make 35×35mm2 Single crystal Si thin films.
2. Fabrication of solar cell
The process of fabrication of solar cells has been delay. Now we have been making some single crystal Si thin films and we have been trying to fabricate solar cells.
3. Designing of prototype machine
The process of out line of the designing of a prototype is almost finished.
4. Business planning
We have been contact with manufactures of bulk type solar cell, manufacturers of Si wafer and manufactures of planning for solar cell market.
Summary
We succeed in fabrication of single crystal Si thin films and we have been trying to make solar cells using the Si thin film. And then we proposed to some manufactures of solar cells.
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