成果報告書詳細
管理番号20110000001317
タイトル*平成22年度中間年報 超高密度ナノビット磁気記録技術の開発(グリーンITプロジェクト)
公開日2011/11/26
報告書年度2010 - 2010
委託先名株式会社日立製作所 株式会社日立グローバルストレージテクノロジーズ 株式会社東芝
プロジェクト番号P08010
部署名電子・材料・ナノテクノロジー部
和文要約和文要約等以下本編抜粋:研究開発項目(1)「超高密度ナノビット磁気媒体技術の研究開発」 (1)ナノビット微細加工技術の研究開発(株式会社東芝、株式会社日立製作所) 株式会社東芝 ・自己組織化マスクと共存するサーボパターンを具備した2.5 Tb/in2(17 nmピッチ)のCoPtビットパターンド媒体を作製・評価した。 ・再委託先の群馬大学では、自己組織化ポリマーの配列乱れを少なくする制御構造を設計、電子線描画により実証した。制御構造スタンパ化を実証した。 株式会社日立製作所 ・イオン注入の磁気モーメント変調方式と磁気異方性変調方式の有効性を確認した。 ・自己組織化によるガイドパターン密度高倍化プロセス(密度4 倍化)で3.9 Tb/in2 相当の規則パターンを3σ=4.5 nm で作製した。
英文要約Title: Development of Nanobit Technology for Ultra-high Density Magnetic Recording (Green IT Project) FY2010 Annual Report
This project aims to establish ultra-high density magnetic recording technology, which leads to lower power consumption of IT system by reducing the number of HDDs installed in a data center. The project covers all the key technologies for ultra high-density HDD, such as media, head and addressing technologies. The developed elemental technologies will be integrated and the feasibility of the system will be demonstrated by the end of the project. In fiscal year 2010, a set of 2.5 Tb/in2-class element technologies was developed by leveraging the previous achievements such as energy assist head integration technology. The major results of the research in fiscal year 2010 are as follows. (1) Ultra-high density nano-bit media: 2.5Tb/in2 (17-nm pitch) CoPt bit patterned media were successfully fabricated and evaluated. Recording experiments verified successful recording and single bit reversal on the fabricated media. For higher areal density, self-assembling technologies demonstrated successful formation of 3.9 Tb/in2 dot array with 4x density multiplication. Applicability of ion-implantation method, an alternative patterning technology, was also confirmed. Fabrication process of high anisotropy FePt media was developed for thermally-assisted recording. A detailed simulation revealed that the anisotropy corresponds to that for 5Tb/in2-class media. Filtered Cathodic Arc Carbon (FCAC) showed excellent durability and lube adsorptivity under high temperature; equipment are being introduced for media integration. (2) High performance magnetic head: Narrow track head fabrication process 2.5 Tb/in2 was developed. For microwave assisted magnetic recording (MAMR), a few tens of nanometer-size spin-torque oscillators were fabricated and successful oscillation was confirmed. Further world's first demonstration of MAMR effect was performed on the magnetic media. For high-sensitive read head, high MR ratio corresponding to 2.5Tb/in2 was achieved by magnetic nano-contact. A design for 5Tb/in2 was also completed. Further, a 20-nm-class narrow track read head was fabricated and the performance was confirmed. (3) High accuracy nano-addressing: Servo performance of fabricated 2.5 Tb/in2-class bit patterned media with a differential phase servo pattern. The tracking accuracy was confirmed to be 4.4 nm (3-sigma). For precise positioning, fabricated thermal actuator was evaluated and the performance was verified. A 2.5 Tb/in2-class servo system model was proposed and verified by the developed flow-induced vibration simulator. (4) HDD system: Macro-specifications to realize 2.5Tb/in2 were verified with experimental data for the individual components. Two sets of macro-specifications (for energy assisted recording and bit patterned recording) were verified. Macro-specifications for 5Tb/in2 were also proposed.
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