成果報告書詳細
管理番号20120000000716
タイトル*平成23年度中間年報 ナノテク・先端部材実用化研究開発/ナノホール/ダイポール・アンテナを用いた赤外線放射および受信素子の研究開発
公開日2012/7/19
報告書年度2011 - 2011
委託先名独立行政法人物質・材料研究機構 国立大学法人大阪大学 豊田合成株式会社 株式会社豊田中央研究所
プロジェクト番号P05023
部署名電子・材料・ナノテクノロジー部
和文要約和文要約等以下本編抜粋:
1. 研究開発の内容及び成果等
(1)屈折率制御型ナノホール・アンテナを用いた赤外線走査素子の開発
赤外領域における電磁界解析手法の確立と広角度にビーム走査可能なナノホール配列積層構造の設計を行った。
英文要約Title: Research and Development of Nanodevices for Practical Utilization of Nanotechnology “Infrared-emission and -receiving devices using nanohole and dipole antennas" (FY2009-FY2012) FY2011 annual report
1. Infrared-emission using nanohole antennas. An infrared beam steering device was redesigned with the stacked metal-dielectric hole arrays in view of surface plasmon polariton and localized resonance. The hole array in 40 nm-Al / 50 nm-SiO2 multilayer was composed by rectangle holes whose one side length was kept to 500 nm and another side length was gradually changed around 500 nm on 1µm lattice. This hole array was fabricated with high dimensional accuracy by electron beam lithography and reactive ion etching. A transmission phase difference from 1470 nm to 1540 nm was directly evaluated with interferometric microscope, and π/2 phase shift at both ends of hole array was observed. This value is corresponding to the beam steering angle of 4 - 8 degrees. For practical applications, output laser beam is scanned by changing the refractive index of the liquid crystal infiltrated in the air-hole. Some textures of the liquid crystal infiltrated into micro and nano holes were observed by polarization optical microscopy as well as by calculation of Frank free energy. Based on these results, the active beam steering with liquid crystal is currently planned with optimized designed hole array of large steering angle.
2. Infrared-receiving using dipole antennas. In FY2010, we fabricated infrared receiving devices by coupling a metal-insulator-metal (MIM) tunneling diode with a bowtie antenna for each. However, their infrared sensitivity was as low as about 1/10 of the target sensitivity (0.1 A/W) in FY2010 and their signal to noise (S/N) ratio was also very low. In order to improve the sensitivity and S/N ratio, we reduced the thickness of the tunneling barrier layer of the MIM diode to 1 nm and stabilize the tunneling barrier layer by improving the purge time and annealing the sample during its deposition process. The output current component by receiving infrared by the antenna is calculated as the difference between the output current when the plane of the polarization of the infrared is parallel to the antenna and that when the plane of the polarization of the infrared is perpendicular to the antenna. In the device fabricated in FY2011, the difference of the output current component is 50 nA in maximum and from the current the sensitivity is calculated to be 0.38 A/W. We are now verifying whether its incident IR-to-current is by direct rectification of the resonance current in the antenna. We are now planning to redesign the device including optimization of the thickness of the tunneling barrier layer and the configuration of the transmission lines to attain the goal sensitivity at 0.5 A/W, and also planning to design the antenna arrays for receiving infrareds having multiple wavelengths.
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