成果報告書詳細
管理番号20120000000841
タイトル*平成23年度中間年報 超高密度ナノビット磁気記録技術の開発(グリーンITプロジェクト)
公開日2012/8/2
報告書年度2011 - 2011
委託先名株式会社日立製作所 株式会社日立グローバルストレージテクノロジーズ(株式会社HGST JAPAN) 株式会社東芝
プロジェクト番号P08010
部署名電子・材料・ナノテクノロジー部
和文要約和文要約等以下本編抜粋:
研究開発項目1「超高密度ナノビット時期媒体技術の研究開発」
(1)ナノビット微細加工技術の研究開発(株式会社東芝、株式会社日立製作所)株式会社東芝
・12nmピッチ自己組織化マスク(PS-PDMS)を用いてFePt磁性膜加工を行いTb/inナノビットを±4.5nmで配置した。
英文要約Title: Development of Nanobit Technology for Ultra-high Density Magnetic Recording (Green IT Project)(FY2008-FY2012) FY2011 Annual Report
This project aims to establish ultra-high density magnetic recording technology, which leads to lower power consumption of IT system by reducing the number of HDDs installed in a data center. The project covers all the key technologies for ultra high-density HDD, such as media, head and addressing technologies. The developed elemental technologies will be integrated and the feasibility of the system will be demonstrated by the end of the project.
In fiscal year 2011, a set of 5 Tb/in2-class element technologies was developed by leveraging the previous achievements. The major results of the research in fiscal year 2011 are as follows. (1) Ultra-high density nano-bit media: A 5Tb/in2 (12-nm pitch) FePt bit patterned medium with an alignment error less than 9nm-pp was successfully fabricated. No-defect alignment of self-assembled polymer within a SEM (x100,000) view was achieved by circular guide and post. Scattering of ions in a magnetic layer was reduced by reducing the incident energy. This shows an availability of ion-implantation method as a fabrication process of 5Tb/in2 bit patterned media. A circularly aligned 5 Tb/in2 dot array was obtained with 9x density multiplication technique. Polymer structure of the diblock copolymer was modified for the density of 6 Tb/in2. L10 FePt-C granular media was successfully fabricated by co-sputtering of FePtAg and C targets with simultaneous heating. 5Tb/in2 patterned media with a flatness less than 5nm was achieved by C filling process. Excellent durability and flyability of a protective layer with lubricant (less than 1.6nm in thickness) under high temperature was confirmed. (2) High performance magnetic head: Head integration technologies for the microwave assisted recording were developed. An oscillator was successfully placed between a main pole and a trailing shield. Write pole structure was designed to control gap filed and recording field independently. Microwave oscillation was confirmed for a fabricated 2.5 Tb/in2 head. MR (Magneto resistance) ratio of 40% at 0.2 ohm/um2 areal resistance was achieved. Detailed simulation revealed that these properties had a potential for 5Tb/in2. TMR heads with narrow track width less than 20nm was fabricated with low etching damage (10% reduction in MR). (3) High accuracy nano-addressing: Specifications of positioning control system and flow-induced vibration for 5 Tb/in2 were proposed. A 5 Tb/in2-class servo system model was proposed and verified by the developed nano-addressing simulator and experiments. (4) HDD system: Specifications of 5 Tb/in2 read head were proposed. By introducing the ITIC(Intertrack Interference Canceller), low error rate (0.001-0.0001) was obtained for a read head with gap length of 15nm and magnetic read width of 15nm.
ダウンロード成果報告書データベース(ユーザ登録必須)から、ダウンロードしてください。

▲トップに戻る