成果報告書詳細
管理番号20130000000389
タイトル*平成24年度中間年報 社会課題対応センサーシステム開発プロジェクト
公開日2013/5/31
報告書年度2012 - 2012
委託先名技術研究組合NMEMS技術研究機構
プロジェクト番号P11006
部署名技術開発推進部
和文要約
英文要約Title: The Sensor System Development Project to Solve Social Problems (FY 2011-FY
2014) FY 2012 Annual Report

The Sensor System Development Project has been engaged in the development of green
MEMS sensors, including electric current/magnetic field sensors, dust sensors, CO2
sensors, VOC sensors, and infrared array sensors. For the electric current/magnetic field
sensor, we proposed an ultra-small, non-powered configuration capable of adjusting the
bias magnetic field between 100 μT and 10 mT and confirmed that a sensor utilizing the
magnetoresistance effect can operate under low power, no greater than 100 μW, when
combined with this configuration applying a bias magnetic field. We built a prototype of
a dust sensor and verified the sensor's ability to detect particles between 1 and 5 μm at a
rate of about 5 x 10-5 x per second. Further, we combined the trigger
unit with the sensor unit and confirmed that the sensor could operate under pressure
changes of 10 Pa or greater. Our studies on improving CO2 detection sensitivity of CO2
sensors based on impedance values showed promise for obtaining the target resolution
x100 ppm for the range of CO2 concentrations between 300 and 3,000 ppm. Calculations
of power consumption during impedance measurements confirmed that the sensor's
power consumption was lowered to an order of 100 μW. We manufactured a prototype
of a polymer-based, oscillating VOC sensor having a resonant frequency of several
hundred kHz, a Q factor of 100 or greater, and an output of several mV. We also studied
configurations of a VOC sensor module (a module combining a VOC sensor with drive,
detection, and wireless communication circuits) and conducted preliminary calculations
of power requirements for the drive, detection, and wireless communication functions.
With this information, we designed a VOC sensor module having the dimensions 20 mm
(W) x 20 mm (H) x 10 mm (D) that is capable of measuring gas concentrations once every
minute with an average power consumption of 100 μW or less. For infrared sensor arrays,
we studied wafer-level bonding conditions of a vacuum seal in the thermopile infrared
sensor element that was bonded using a gold-tin eutectic alloy. The results were in line
with our plans for the initial properties of the infrared sensor array. Specifically, the
number of pixels was 256 (16x16), the chip size was 7x7 mm, the pixel pitch was 250 μm,
the response rate was 30 msec, the viewing angle was 90 degrees, and the temperature
resolution under 100 Pa vacuum was 0.25K or less. In our efforts to develop a green
sensor terminal equipped with a wireless communication function and a standalone power
source, we developed an ultra-small standalone power source having a nanofiber structure
and capable of high-efficiency photoelectric/thermoelectric conversion, an ultra-small
high-performance standalone power source designed for low-light environments, a
technology for integrating green sensor terminal functions, a technology for low-power
wireless communications, and a green sensor concentrator. In order to make the
ダウンロード成果報告書データベース(ユーザ登録必須)から、ダウンロードしてください。

▲トップに戻る