成果報告書詳細
管理番号20130000000392
タイトル*平成24年度中間年報 次世代素材等レーザー加工技術開発プロジェクト 次世代レーザー加工技術の研究開発(2)
公開日2013/5/31
報告書年度2012 - 2012
委託先名国立大学法人大阪大学
プロジェクト番号P10006
部署名技術開発推進部
和文要約
英文要約Title : High-power Pulsed Fiber Laser and Processing Technology Project (FY2010-FY2014) FY2012 Annual Report

II. Development of technologies for the advanced laser;

(1) Development of pulse-controllable high-performance fiber laser;
1) Development of technologies for pulse control of fiber laser;
Optimization of functions of pulse width variability and controlling pulse shape of fiber laser with pulse width of 3-10 ns were carried out. Improvement of firmware and software of pulse shape control circuit was promoted.

2) Development of technologies for fiber laser module;
Average output of 100 W with pulse width of 100 ns and repetition rate of 1 MHz was obtained. Fiber laser module was developed. In the fiber laser module, output from LMA fiber was amplified with a photonic crystal fiber (PCF). Average output of 150 W with pulse width of 100 ns and repetition rate of 1 MHz could be developed.

3) Technology development for high-power fiber laser.;
The pumping conditions and propagation mode control of the fiber laser system 1 were optimized, and the interim goal (the output power: 150W, the pulse width: 3-10 ns, the repetition frequency: 75 kHz, beam quality: M2=<1.5) was obtained. The output pulse of fiber laser system was entered to the booster amplifier in "development of kW class booster amplifier".
It combined with this fiber system and built one more set of the fiber laser system 2. When two fiber laser systems were operated on the same wavelength, we studied two beams polarization combination method in the low output. The output characteristics such as the mode stability and beam quality were measured and the solution technique was developed.
Furthermore, after the fiber laser system 2 was operated on a different wavelength, two wavelengths combination method was examined in the low output. The optimal wavelength combination technique was developed.

(2) Development of the amplifying technologies of pulse laser;
1) Development of kilo-watt booster amplifier;
A kW class booster amplifier was designed and constructed. Using a fiber laser system developed in this project, the kW class booster amplifier was tested in high power region. Optical arrangement for a polarization combined beam was optimized. Guideline to achieve the final goal was obtained. Also a compact booster amplifier developed in 2011 FY, was tested. The knowledge of the experiments was fed back to the design of a final booster amplifier.
A united simulation code for thermal-hydrodynamic analysis and ray-tracing was used to analyze the beam propagation in the test module of the booster amplifier. The results were compared to the experimental data for optimization of the booster amplifier.

2) Development of the amplifier technologies of annealing laser;
Development of the first main-amplifiers and the second main-amplifiers of the annealing laser was finished. We considered beam propagation for an optical damage avoidance and a high efficient amplification, and successfully achieved high average power laser output. We achieved all mid-term goals on developing of laser on 1 μm band of fundamental wavelength, and shifted to evaluation of annealing process Amplification test of the laser system is in progress to ensure both high efficiency and avoidance of laser induced damage. In accordance with design manual of ULVAC, Inc., we have shaped beam pattern and mounted attenuation module of laser output to necessary for cooperation of annealing processing system.
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