成果報告書詳細
管理番号20130000000423
タイトル*平成24年度中間年報 太陽エネルギー技術研究開発 太陽光発電システム次世代高性能技術の開発 フレキシブルCIGS太陽電池モジュールの高効率化研究(装置開発)
公開日2013/6/22
報告書年度2012 - 2012
委託先名株式会社アルバック
プロジェクト番号P07015
部署名新エネルギー部
和文要約
英文要約Title: Development of high performance flexible CIGS PV modules Development of equipment (FY2010-FY2014) FY2012 Annual Report

(1) Manufacture and inspection of paper inserting mechanism in the CIGS layer evaporation system
Paper inserting mechanism was made to protect CIGS layer deposited to the base material. Tension control was inspected and it was confirmed that paper and base material were winded together into the WD roller with low tension.
(2) Base material heating mechanism inspection and measures for problems
Base material was heated with thermocouples attached and it was confirmed that base material was heated to 500 degrees C or more. The terminal of the heater was thermally-deformed and the wire was burnout by Se corrosion. Lamp heater which resolved those problems was made.
(3) Film thickness uniformity inspection and improvement of evaporation sources for Se, In, Ga deposition
Film thickness uniformity was inspected in Se, Ga and In deposition. Within 250mm width direction, film thickness uniformity reached ±5% or less in InGaSe deposition.
For heater earth fault, evaporation source was improved. It was confirmed that there was no earth fault after long hours of operating test.
(4) Film thickness uniformity inspection of Na supply layer and Mo backside electrode layer of the CIGS sputtering system
Film thickness uniformity of Na supply layer and Mo backside electrode layer were inspected. Within 250mm width direction, Na supply layer did not reach ±5% or less, but Mo electrode layer reached ±5% or less.
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