成果報告書詳細
管理番号20130000000257
タイトル*平成22年度中間年報 新エネルギーベンチャー技術革新事業 新エネルギーベンチャー技術革新事業(太陽光発電) 薄膜型太陽電池加工用レーザーの技術開発
公開日2013/8/20
報告書年度2010 - 2010
委託先名株式会社シングルモード
プロジェクト番号P10020
部署名技術開発推進部
和文要約
英文要約Title: New Energy Technology Research Development /New Energy Venture Business Technology Innovation Program (Photovoltaic Power Generation)./ Development of High Power Second-Harmonic Generation (SHG) Laser for Thin Film Type Solar Battery Processing (FY2009-FY2011) FY2010 Annual Report

We would develop a high power second-harmonic generation (SHG) laser for the thin film type solar battery processing. Fast process throughput and high-quality scribes are also necessary to deliver a high yield of final product of the thin film solar battery. Therefore, high power and high beam quality are requested for the SHG laser. In FY2010, we examined SHG with cavity configurations of single Nd:YVO4 crystal and tandem crystals, and found that the power of over 22W could be generated by using a single crystal with double-pass pumping. Based on the results, we developed a prototypical laser in an air-cooled compact laser head. The maximum SHG power was 22.6W at the repetition rate of 150 kHz. The optical-optical conversion efficiency was 42.0%. The dimension of the laser head was 200*140*95mm. The repetition rate was continuously tunable from 40 kHz to 200 kHz. TEM00 was obtained at entire power range. And an output power stability of +/-0.75% was demonstrated at 20W operation during 24 hours continuous running. The scribing test of ITO film was demonstrated with the prototypical laser. A target scribing speed of 2 m/sec for large panels was achieved and the width of the scribed line was less than 30 micron.
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