成果報告書詳細
管理番号20130000000725
タイトル*平成24年度中間年報 ナノテク・先端部材実用化研究開発 三次元イメージング用帯電液滴ナノプローブ源の開発
公開日2013/10/1
報告書年度2012 - 2012
委託先名国立大学法人山梨大学 アルバック・ファイ株式会社 株式会社シンクフォー
プロジェクト番号P05023
部署名電子・材料・ナノテクノロジー部
和文要約
英文要約 The electrospray droplet impact (EDI) method can provide 4 orders of magnitude higher ionization efficiency than previous atomic probes and a few hundreds of nano meters spatial resolution. Therefore, EDI is a promising technique for surface and interface analyses. The purpose of this project is to develop a high performance charged-droplet nano probe, to be installed on next-generation secondary ion mass spectrometry instruments. University of Yamanashi is working to develop the elemental technologies for this project, and ULVAC-PHI Inc. and SYNCFOR Inc. are working to develop the practical technologies.
(1) Development of elemental technologies (University of Yamanashi)
 In this project, we must develop three elemental technologies for the charged-droplet nano probe, which should provide high beam density (>100 micro A/cm2), short pulse beam (<10 ns) and small beam diameter (<500 nm). In order to extremely increase the brightness of the beam source, we developed a technique for producing stable electrospray of volatile liquids (especially water and aqueous solutions) under vacuum conditions last year. Based on this technique, we have designed and manufactured a prototype of a vacuum-type electrospray droplet beam source. The volume of the new beam source reduced to less than 1/4 of the previous ambient electrospray source, and the weight also decreased to less than half of the previous one. In this new setup, in order to explore the possibility of the miniaturization of the total scale of the beam source, not only CO2 laser (wave length λ= 10.6 micro m) but also diode laser (λ= 808 nm) can be irradiated to the tip of the electrospray emitter at the same incident angle of 50 degrees with respect to the droplet beam direction. In addition, several commercial emitters were evaluated, i.e., metal-coated SilicaTip (i.d. 30 micro m) and stainless steel emitters (i.d. 30~50 micro m) in order to check durability. As already demonstrated in the previous study, a stable vacuum electrospray of pure water and aqueous solutions can be realized by maintaining appropriate vacuum conditions to prevent the electric discharge and by heating the tip of the electrospray emitter with laser to maintain the liquid state. The typical three modes of electrospray (pulsed-cone jet, cone jet and multi jet) were clearly recognized also by using the diode laser. We started to evaluate the performance of the new vacuum-type charged droplet beam source by measuring the basic properties, such as beam diameter, current density, and droplet size. The droplet size distributions were directly observed by using a short pulse laser, and it was found that the charged droplets produced from vacuum electrospray were uniform in size. The beam diameter was also evaluated by scanning on a metal mesh and detecting secondary electrons emitted from the mesh. On the basis of these results, the vacuum electrospray technique can be expected to be a high-performance massive cluster ion
beam source.
(2) Development of practical technologies (ULVAC-PHI Inc. and SYNCFOR Inc.)
 To achieve the final target of commercially releasing a charged-droplet beam gun as a
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