成果報告書詳細
管理番号20120000001171
タイトル*平成23年度中間年報 太陽エネルギー技術研究開発 太陽光発電システム次世代高性能技術の開発 フレキシブルCIGS太陽電池モジュールの高効率化研究(装置開発)
公開日2013/10/31
報告書年度2011 - 2011
委託先名アルバック株式会社
プロジェクト番号P07015
部署名新エネルギー部
和文要約
英文要約Title: Development of High-efficiency Flexible CIGS Photovoltaic Module (Equipment Development) (From FY2011 to FY2013)

1. Purpose
To develop roll to roll coating equipments for both CIGS layer and Na supply layer with back side electrode layer of high-efficiency flexible photovoltaic module.

2. Contents and results
(1) Fabrication and experiment of CIGS evaporation chamber and winding unit
Chamber for CIGS evaporation equipment, winding unit, degassing unit, substrate heater unit and cooling unit are assembled and examined. Ultimate pressure 1.0E-3 Pa or less and pressure rising 5.0E-3 Pa m3/sec or less which are the target values for vacuum performance has been achieved. Winding slippage at high temperature heating has been achieved within +/- 2.5 mm as target value at 16 m long web transfer (Distance between unwinding shaft and winding shaft is 13m). Winding tension fluctuation within +/- 5% has been achieved as target value at tension 100N and 150N at winding speed of 0.6 m/min.

(2) Fabrication of Line cell for CIGS evaporation equipment
Two sets of evaporation source for Cu, Ga and In for 300 mm wide web are fabricated.

(3) Fabrication of Se evaporation source for CIGS evaporation equipment
Two sets of evaporation source for Se for 300 mm wide web are fabricated.

(4) Fabrication and examination of CIGS sputtering equipment
Chamber, winding unit, degassing unit for coating Na supply layer and electrode layer are fabricated. Ultimate pressure 2.5E-4 Pa or less and pressure rising 6.5E-4 Pa m3/sec or less which are target values of vacuum performance have been achieved. Winding tension fluctuation within +/- 5% has been achieved as target value at tension of 100N, 150N and 200N.

(5) Fabrication of Cathode for CIGS sputtering equipment
We have made a sputtering cathode for coating Na supply layer with back side electrode.

3. Schedule
1) Evaporation equipment
We will make and test additional two sets of line cell and two sets of Se evaporation source from April to May in 2012. Devices arranged around the evaporation sources will be modified from April to June in 2012. After that, we will develop, design and make an improved line cell on the basis of current improvements.

2) Sputtering equipment
We will modify power supply unit in order to increase sample making efficiency from April to May in 2012. We will develop a measure to improve production efficiency of back side electrode coating along with sample making. After that develop process will carry out to improve production efficiency for Na supply layer coating.
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