成果報告書詳細
管理番号20130000000748
タイトル*平成24年度中間年報 次世代プリンテッドエレクトロニクス材料・プロセス基盤技術開発
公開日2013/10/18
報告書年度2012 - 2012
委託先名次世代プリンテッドエレクトロニクス技術研究組合
プロジェクト番号P10026
部署名電子・材料・ナノテクノロジー部
和文要約
英文要約In order to accelerate the development of printed electronics industry, advanced printing techniques for flexible device fabrication have been investigated. Continuous printing process for manufacturing a TFT sheet with high quality and high throughput was examined. Conducting ink, semiconductor ink and dielectric ink materials were studied for fabricating a gate electrode, a gate dielectric layer, a semiconductor layer, source drain electrodes and wiring by using developed printing process. Printing machines, which were suitable for these processes, were also designed. Using these newly developed materials and process, relationship between the performance of printed pattern or TFT devices and the condition of the device fabrication process was examined.
Alignment techniques for preparing flexible TFT sheet with high resolution and accuracy was investigated, Print techniques with high uniformity for preparation of a large-area device with high quality was also examined. As a result of testing several printing condition, a design guideline to improve the performance of the printed device could be obtained.
Low temperature process was examined to reduce the process damage and increase the throughput for fabricating flexible printed devices. In order to reduce the process temperature, advanced sintering techniques for preparing a dielectric layer and a conductive layer were examined by using high density external energy. Ink materials, which are suitable to these low temperature manufacturing processes, were also examined using Nano-metal technology. By applying these newly developed processes which reduce the process damages on the prepared device, we have succeeded in improvement of the productivity of printed TFT manufacturing.
In order to improve the performance of printed TFT, a soluble organic semiconductor material, device structure for printed TFT, and measurement method of printed TFT performance was also examined.
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