成果報告書詳細
管理番号20140000000560
タイトル*平成23年度中間年報 「新エネルギーベンチャー技術革新事業 新エネルギーベンチャー技術革新事業(風力その他未利用エネルギー) 磁歪材料を用いたMEMS型振動発電素子の技術開発」
公開日2014/9/17
報告書年度2011 - 2011
委託先名株式会社 M.T.C 国立大学法人金沢大学 テセラ・テクノロジー株式会社
プロジェクト番号P10020
部署名イノベーション推進部
和文要約
英文要約Title: New Energy Venture Business Technology Innovation Program / New Energy Venture Business Technology Innovation Program (wind power generation and other untapped energies ) / Investigation of inverse magnetostrictive property of magnetostrictive ribbon for sheet type vibrational energy harvesting device (FY2011-FY2012) FY2011 Annual Report

Energy harvesting from ambient vibrations has been in the spotlight recently.Sheet type vibration based energy harvester is advantageous to conventional one using cantilever that it does not have resonance frequency and can generate electricity if the frame vibrates.
(1)Material( Magnetostrictiv sheet); In this period of the project, we investigated the inverse magnetostrictive properties of magnetostrictive ribbon, Metglas, for device material. Metglas is Fe-Si-B based amorphous alloy with good ductility and high coupling coefficient (> 0.9). The ribbon of 10mm by 10mm by 20μm thickness was bonded on aluminum cantilever beam of 2mm thickness oscillated by exciter. The ribbon was also wound pickup coil to measure the magnetization varied by the stress. The results were compared for four samples, 2605SA1, 2605SC, 2605CO (Fe-B-Si) and 2605MB3 (Fe-Ni). The relationship between the strain and flux density variation dB are obtained. The device without bias field will provide smaller width of flux variation; it can be configured simple and rigid for practical usage. By frequency response, peak in output was observed in 1st and 2nd bending resonance of the beam, which demonstrates the advantages of sheet device utilizing high frequency vibration for power generation.
(2)Trial product of energy harvesting device; We are investigating tow types of 3D pickup coil structures prepared by MEMS process, which surround
magnetostrictiv sheet. The first type of structure has embedded Cu stripe pattern in Si substrate, made by MEMS and CMP process. At present we have finished Cu damascene process. Next process is coating film for isolation. Finally we will make 200-400 turns 3D coils. We are developing these processes using the equipments of Tohoku University(Sendai). The second type has 3D coil pattern, screen printed on isolated magnetostrictiv sheet directly, which has 140 through hall vias(200μmφ). At present stage, we have finished Ag paste pattern for 3D coil, by screen printing, which has 70 turns. The properties , such as resistivity of 3D coil, will be measured.
(3)Circuit design and trial product of circuit bord ; First of all, we have investigated circuits for bulk-type vibrational energy harvesting device, which has already developed by Kanazawa University until MEMS type is prepared.Two type of power control block has been investigated, multi stage type and diode type circuits for rectification. Maximum transfer efficiency, 56.9%. was obtained in the case of transform ratio 3.6 and in the multi stage type. Estimating power is 744μW in this case. We have found that it should be selected optimum transform ratio and circuit tuning. Also we should require same circuit tuning in the case of MEMS type harvester.
(4)Business Planning; For the research of industry needs, we joined exhibition (Plant show etc.) and have contacted key persons who has responsibility of making selection energy harvesting devices in their chemical plant. Then we will be able to show the prototype module of energy harvesting system.
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