|英文要約||Title: New Energy Technology Research Development /New Energy Venture Business Technology Innovation Program (Photovoltaic Power Generation)./ Development of High Power Second-Harmonic Generation (SHG) Laser for Thin Film Type Solar Battery Processing (FY2009-FY2012) FY2011 Annual Report
We would develop a high power second-harmonic generation (SHG) laser for the thin film type solar battery processing. Fast process throughput (High throughput) and high-quality scribes are also necessary to deliver a high yield of final product of the thin film solar battery. Therefore, high power and high quality beam profile are requested for the SHG laser. In FY2011, we developed an air-cooled SHG laser which combined a laser head and a laser diode into a single package that is simple to be integrated into machine tools. The laser generated SHG power over 22W, the same as the laser developed in FY 2010 which separated a laser head from a laser diode. The range of the repetition rate 1 year ago was from 40 kHz to 200 kHz, and is extended to from 30 kHz to 300 kHz. The dimension of the laser head is 205*205*315mm and is smaller than competitive diode-pumped solid state lasers of similar power. We also manufactured a thin film solar panel laser scribing system which has 6 galvano scanners and a stage for 1100×1400 panel. The scribing tests of amorphous silicon layer, ITO layer and aluminum layer on a sheet of glasses were demonstrated and all of the layers were scribed well with line widths less than 25 micron.