|タイトル||*平成25年度中間年報 太陽エネルギー技術研究開発 太陽光発電システム次世代高性能技術の開発 フレキシブルＣＩＧＳ太陽電池モジュールの高効率化研究（装置開発）|
|報告書年度||2013 - 2013|
|英文要約||Title: Development of high performance flexible CIGS PV modules (Development of equipment)
(FY2010-FY2014) FY2013 Annual Report
Contents and results of research and development
(1)Web winding structure for CIGS layer on “thin film substrate”
In the case of dynamic coating on “thin film substrate”, film tension should be kept low magnitude to prevent from film broken problem.
For the above technical issue, roller formation and structure were adjusted to optimum condition. Film was wound up normally during CIGS coating even if substrate temperature was kept higher than 400℃.
(2)Lifetime improvement of IR lump for substrate heating
Prototype of IR lump had a problem that electric terminal often broke due to the corrosion by evaporated Se.
To solve the above problem, we improved electrode structure and operation software.
Designed long time durable heater that electrode is physically protected from a Se vapor atmosphere, now testing for longer than 300hours and also a new type of lump reflector which showed less thermal transformation installed and evaluating in situ at the same time.
(3)Improvement of film thickness uniformity for In,Ga evaporation source
Evaporation rate uniformity vs. time dependence for line source was investigated by using off-line batch equipment. Evaporation rate was monitored by CRTM (crystal rate thickness monitor) through experiment.
The result shows that distribution of rate is controlled within 5% by adjusting input power periodically through the process.
We have found the appropriate control parameter to get a good uniformity and a flat concentration even if longer production process in the future.
(4)Improvement of anticorrosive structural material for Se evaporator
In the case of using iron included material for Se evaporator, there was a problem that some parts lost their functions because of brittle Fe-Se byproducts which is induced by the deposited Se corrosion.
Several materials like precious metals or ceramics considered to have high anticorrosive property for Se were evaluated.
As a result, we have had comprehension about more reliable matter and surface treatment for structural material and are now investigating.
(5)Process improvement for back layer electrode coating about sputtering equipment
Thickness uniformity of the order of 3% is obtained within necessary effective range aprox.270mm width by using modified aperture mask to adjust longitudinal coating zone.
At the same time the mask-made none coated aria near the film edge can prevent unusual discharge from the coated metal surface to the cooling roller and consequently can lead to reduce discharge traces on film surface and the defects.
(6)Automatic operation software for sputtering equipment
Automatic operation software was made and installed. Initial evaluation from evacuation to coating and vent was already done and continue to evaluate program flow stability.