成果報告書詳細
管理番号20140000000655
タイトル*平成25年度中間年報 次世代素材等レーザー加工技術開発プロジェクト 次世代レーザー加工技術の研究開発(4)
公開日2014/10/29
報告書年度2013 - 2013
委託先名株式会社アルバック
プロジェクト番号P10006
部署名ロボット・機械システム部
和文要約
英文要約Title: Laser Material Processing Technology Development Project for Next-generation Materials, etc. Development of laser process technologies for the surface treatment (FY2010-FY2014) FY2013 Annual Report

(1) The development of the wide line-beam shaping technology
The high-energy gaussian-shaped beam emitted from the unique green-laser oscillator which was developed by ALPROT team was shaped into over 700mm-wide line-shaped beam with the use of a series of high quality lenses which had been developed by ULVAC team.
The dimension of line-shaped beam was measured using high-resolution beam profile monitor.

Line-shaped rectangle beam
line length: 750mm (along major axis)
beam focusing: 19μm (along minor axis)
energy uniformity along major axis: ±8%

(2) The development of high-accuracy beam evaluating unit
The line-shaped beam profile monitor had been developed and it was installed at the processing pedestal of laser annealing system.

(3) The laser process technology for surface treatment
A sample piece of a-Si thin film was irradiated with line-shaped green-laser beam and it was found that the a-Si film was changed to poly-Si film.
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