成果報告書詳細
管理番号20150000000331
タイトル*平成26年度中間年報 エネルギー・環境新技術先導プログラム 高品質/高均質薄膜を実現する非真空成膜プロセスの研究開発
公開日2015/5/27
報告書年度2014 - 2014
委託先名国立大学法人京都大学 公立大学法人高知工科大学 国立大学法人東京大学 株式会社FLOSFIA
プロジェクト番号P14004
部署名イノベーション推進部
和文要約
英文要約Title:
Research and Development on Non-Vacuum-Based Processes for Thin Films of High-Quality and High-Uniformity

(FY2014-FY2015) FY2014 Annual Report

As the earliest stage of this project, we concentrated on establishing the basic pathways of the research and development by reviewing the reference literatures and the experimental data. The achievements in FY2014 are listed in the followings;
1. Basic growth conditions, that is, the gas flow rate and the growth temperature, and design concepts of the growth system, which is to be installed in FY2016 for the growth of single-crystalline oxide semiconductors, have been decided. It was agreed that the growth mechanism will be discussed with regard to the CVD process.
2. We have decided to discuss the growth mechanism of amorphous or polycrystalline oxide films in terms of Leidenfrost effect. Basic design of the important components in the growth system has been established. The basic components of the growth system, which is to be installed in FY2016 for the growth of amorphous or polycrystalline oxide films, have been discussed and the design of several key components has been established.
3. We proposed the methods for characterizing the thin films; nano-scale characterization and device fabrication.
4. The design criteria of simulation model using Computational Fluid Dynamics (CFD) has been decided by discussion among members and literature research. We planned to observe mist behavior by Leidenfrost effect to acquire fundamental data for model designing and then a simulation model including the effect of reaction will be designed.
5. For the establishment of a proto-type growth system, we have decided to develop novel valves and monitoring systems, and to elucidate the basic problems to be solved.
6. Professor Hirao at Kyoto University agreed to contribute as a chair of the supervising committee. Then we started the selection of the committee members as well as advisory companies.
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