成果報告書詳細
管理番号20150000000541
タイトル*平成26年度中間年報 エネルギー環境先導プログラム トリリオンセンサ社会を支える高効率MEMS振動発電デバイスの研究
公開日2015/9/1
報告書年度2014 - 2014
委託先名技術研究組合NMEMS技術研究機構
プロジェクト番号P14004
部署名イノベーション推進部
和文要約
英文要約Title:A Study on High Efficiency MEMS Micro Energy Harvesters for Trillion Sensor Society (FY2014-FY2015) FY2014 Annual Report

1-(1)
An analytical model for electret energy harvester has been developed to describe the conversion efficiency and the electret memory potential. Based on the model, we have determined the device structures and dimensions, which will be used in MEMS processes to be performed in April 2015 and later.

1-(2)
Statistical analysis has been performed on the long-term reliability of potassium solid ions trapped in a silicon oxide film. Lifetime of more than 400 years is expected before a -1 dB degradation of performance at room temperature of 25 degree C.

3-(3)
An equivalent circuit model for electret energy harvester has been developed by using a mechano-electric multiphysics behavior model on an electrical circuit simulator.
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