成果報告書詳細
管理番号20160000000277
タイトル*平成27年度中間年報 エネルギー・環境新技術先導プログラム トリリオンセンサ社会を支える高効率MEMS振動発電デバイスの研究
公開日2016/5/20
報告書年度2015 - 2015
委託先名技術研究組合NMEMS技術研究機構
プロジェクト番号P14004
部署名イノベーション推進部
和文要約
英文要約Title : Advanced Research Program for Energy and Environmental Technologies / A Study on High Efficiency MEMS Micro Energy Harvesters (EH) for Trillion Sensor Society (FY2015-2016) FY2015 Annual Report

In this NEDO program titled “A Study on High Efficiency MEMS Micro Energy Harvesters (EH) for Trillion Sensor Society,” we perform research and development for novel EH that could be used as a power source for distributed wireless sensor nodes needed in emerging Trillion-Sensor era or so-called IoT (internet-of-things) society. A new technology in MEMS has been introduced in this project, where we aim development of 10 mW class energy harvester within a size of 20 mm in diameter before year 2020.

Action-1: Application of high-density ionic electret for EH: Fabrication processes for both high-density K+ ionic electret and for packaging have been developed to improve the performance and reliability of MEMS vibrational energy harvester. As a result, a force factor of 1×10-4 and power output of 800 µW were experimentally confirmed as a sign of high density electret. Use of vacuum package was found to be indispensable to maintain the EH performance. Equivalent circuit models of high precision were also developed to theoretically predict the device under development.

Action -2: Application of ionic liquid for EH capacity: Extremely large areal capacitance of 1 ~ 10 µF/cm2 associated with the electric double layer of ionic liquid has been newly adopted to develop large output capacitors for energy harvesters. Ionic liquid was used in solidified polymer in a form of a soft gel on an electret film to convert the mechanical squeezing motion into electrical displacement current of more than 22 µA/cm2 at 1.5 V. Such a gel was also found to generate current when the trapped ions are immobilized in the polymer network and electrically polarized.

Action -3: Development of high efficiency EH: MEMS energy harvesters for specific vibration sources have been developed and demonstrated to generate current upwards of 64 µA, by which an array of LED was lit. Output impedance was found to be low 0.6 MΩ. The results were reported in both international and domestic conferences.

Action -4: Use of EH in traffic infrastructures: Actual vibration signals were experimentally obtained from the highways, bridges and their accessary infrastructures, and representative peak acceleration values and dominant frequencies were extracted, which were used to theoretically speculate the performance of the EH under development.

Action -5: Use of EH in office and factory: In a similar manner as those in Action-4, vibration signals were obtained from human bodies, air conditioner compressors, and machines. Based on the results, electrical power earned by the EH was theoretically estimated.

Action -6: International standardization of EH: As a part of the national strategy, we continuously pursued the standardization of energy harvesters in the field of IEC/TC47/SC47F committee in Singapore and else.
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