成果報告書詳細
管理番号20160000000466
タイトル*平成27年度中間年報 インフラ維持管理・更新等の社会課題対応システム開発プロジェクト インフラ状態モニタリング用センサシステム開発 ライフラインコアモニタリングシステムの研究開発
公開日2016/7/13
報告書年度2015 - 2015
委託先名国立研究開発法人産業技術総合研究所 一般財団法人マイクロマシンセンター 明星電気株式会社 沖電気工業株式会社 高砂熱学工業株式会社
プロジェクト番号P
部署名ロボット・AI部
和文要約
英文要約Title:Development of Utility Infrastructure Core Monitoring System(FY2014-FY2016)FY2015 Annual Report

(1)Development of Sensing and Power-Generating Devices for Core Monitoring:For this development,we combined vibration-powered sensor devices with tipping bucket circuits to be able to monitor only peak values of vibration waveforms.We developed AIN thin film vibration-powered sensor devices that are capable of harvesting energy from ambient vibrations.By mounting these sensor devices on the optimized tipping bucket circuits,we were able to verify that the sensing module could perform wireless communications at intervals of approximately 26 minutes using only energy harvested from vibrations with a vibration acceleration of 0.45 m/s2.(2)Development of a Wafer-Level Packaging Technology for AIN Piezoelectric Devices Used in Core Monitoring:To develop a process for mass-producing AIN piezoelectric devices,we developed a deposition technique for controlling the distribution of internal stress in the wafer generated by the AIN piezoelectric film and Pt electrode film and were able to control the amount of curvature in the wafer surface for a cantilever structure on which the thin films are stacked.In developing a wafer-level packaging technology,we optimized conditions for Au-Au surface-activated bonding identified as a promising bonding technique and verified that a high bonding strength of 100 MPa could be achieved at a low temperature of 200℃.(3)Development of Sensor Nodes for Core Monitoring:We created a structural model for a P-type(plastic bottle cap size)node to be used in next year's verification tests for mounting a low-frequency vibration-based generator device together with a high-frequency vibration sensor device,temperature sensor,and wireless module.We verified that there were no problems with the vibration transmission characteristics up to a frequency of 8 kHz.(4)Development of a Network System for Core Monitoring:We implemented our precision time-synchronized,low-power communication method developed last year in a multi-hop network stack and verified its operations.The multi-hop network stack was provided not only with functions for data collection,but also with functions for actual network operations(functions required for M-type(matchbox size)node hardware,security methods,and a participation authentication method).In addition,we manufactured a trial M-type relay node equipped with these functions.(5)Development of a Core Monitoring System:Since sensing and power-generating devices for core monitoring are configured of a combination of sensors having resonance points in low-frequency bands and sensors having resonance points in high-frequency bands,it is possible to detect abnormal vibrations generated by pump bearings,mechanical stiffness,misalignments,and the like,without performing FFT or other frequency analysis.This year we studied algorithms as the logic for fault detection required for steady-state operations and operations in unsteady states occurring during start-up and load fluctuations.
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