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成果報告書詳細
管理番号20170000000158
タイトル*平成28年度中間年報 超先端材料超高速開発基盤技術プロジェクト 先端ナノ計測評価技術開発 ナノ物質計測技術開発・ナノ欠陥検査用計測標準開発
公開日2017/5/9
報告書年度2016 - 2016
委託先名株式会社先端ナノプロセス基盤開発センター 国立研究開発法人産業技術総合研究所
プロジェクト番号P16010
部署名材料・ナノテクノロジー部
和文要約
英文要約Title: Development of nanomaterial measurement technology and measurement standard development for nano-defect inspection (FY2016-FY2018) FY2016Annual Report
 The selection of several kinds of liquids with a high refractive index to detect low refractive index particles (ex. PTFE) was achieved. The liquids were selected from the candidate of 84 kinds by evaluation of safety and physical properties (refractive index, density, viscosity, optical characteristic, steam pressure, isothermal compressibility, etc.). As a result, 4 materials were extracted as a promising candidate.
 We developed novel particle tracking velocimetry method using nano-sized tracer (NPTV method) based on the observation of the motion of bright spots attributed to the light scattering from individual tracers, in contrast to the common optical microscopic velocimetry techniques with submicron/micron sized tracer particles. Using NPTV method, the effect of flow speed on the determination of size of particle in liquid phase by flow particle tracking (FPT) method could be corrected. We also established the analytical algorism and flow channel for FPT method was established.
 The development/application of unique measurement, analysis, and simulation technologies were investigated. These were carried out focused on the potentially promising metal-based patterning materials. A number of characterization/reaction mechanism studies were successfully carried out; showing the effectiveness of the measurement technologies investigated while acquiring new pointers in the fundamental study of metal-based materials.
 The experimental setup for the outgas testing of metal containing resists was prepared on High-Power EUV irradiation tool (HPEUV). Some metallic elements were selected as model materials. The preliminary experiments were carried out to survey the condition of HPEUV. The issues of HPEUV were clarified; (i) establishment of contamination limited regime, (ii) optimization of exposure dose, (iii) improvement of detection method of outgas species.
 We developed in-situ AFM system and in-situ GI-SAXS system to measure surface morphology as well as internal structure in micro-phase separation processes in cooperation with modeling approaches to attain the DSA defect mitigation. Since validity of the experimental and simulation approaches was verified in the series of data, we started in-situ AFM and in-situ GI-SAXS experiments in the micro-phase separation processes in guide pattern control.
 EIDEC explores the EUV Program Defect Mask development to establish a measurement standard for the evaluation of defect detection capability with next generation inspection tools. EIDEC completed the layout design and fabrication of the PDM. The PDM includes programed extrusion, intrusion, and CD defects in lines, holes, and random base patterns by down to 64nm rule design. We confirmed a 10nm, at minimum, sized program defect on the PDM by SEM.
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