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24-hour Continuous Operation of a EUV Light Source with 60W Average Output Achieved
-Major Step towards the Application of LPP Light Sources
in EUV Scanners for Mass Production-

October 2, 2015
New Energy and Industrial Technology Development Organization (NEDO)
Gigaphoton Inc.

As part of a NEDO project, Gigaphoton Inc. achieved the 24-hour continuous operation of a laser-produced plasma (LPP) light source*1 prototype for use in EUV scanners*2 which are currently under development with an average output of 60W under conditions simulating the operational patterns of use in factory production.

As a result, we have made significant progress towards the realization of EUV scanners suitable for mass production.


*1 Laser-produced plasma (LPP) light source: A light source that generates EUV light from plasma by beaming an intense laser beam on a specific substance.

*2 EUV scanner: Next-generation extreme ultraviolet exposure machine used for semiconductors.

For more information, please contact:

Energy Conservation Technology Department
TEL: +81-44-520-5284

Gigaphoton Inc.
Matsui, Corporate Planning Division
TEL: +81-285-37-6931