24-hour Continuous Operation of a EUV Light Source with 60W Average Output Achieved
－Major Step towards the Application of LPP Light Sources
in EUV Scanners for Mass Production－
October 2, 2015
New Energy and Industrial Technology Development Organization (NEDO)
As part of a NEDO project, Gigaphoton Inc. achieved the 24-hour continuous operation of a laser-produced plasma (LPP) light source*1 prototype for use in EUV scanners*2 which are currently under development with an average output of 60W under conditions simulating the operational patterns of use in factory production.
As a result, we have made significant progress towards the realization of EUV scanners suitable for mass production.
*1 Laser-produced plasma (LPP) light source: A light source that generates EUV light from plasma by beaming an intense laser beam on a specific substance.
*2 EUV scanner: Next-generation extreme ultraviolet exposure machine used for semiconductors.
For more information, please contact:
Energy Conservation Technology Department
Matsui, Corporate Planning Division