Plasma Evaluation Tool for Semiconductor Manufacturing Equipment Commercialized
－Wafer Type Indicator for Easy Visualization of Plasma Processing Effects－
December 12, 2016
New Energy and Industrial Technology Development Organization (NEDO)
Based on the results of a NEDO project, Sakura Color Products Corporation plans to develop a "wafer type" (ceramic type) Plasma Indicator™ PLAZMARK®, an evaluation tool for semiconductor manufacturing equipment that makes it easy to visualize the effects of plasma processing. Commercialization is expected in January 2017.
As a result of realizing the wafer shape, it will be possible to evaluate the condition of semiconductor manufacturing equipment more easily than before. In the future, the company aims for the adoption of the technology in the semiconductor manufacturing equipment market for various electronic devices, such as LEDs, MEMS, and timing devices.
For more information, please contact:
NEDO Innovation Promotion Department
Contact Persons: Sato, Hashimoto Tel: +81-44-520-5171