成果報告書詳細
管理番号100013725
タイトル*平成20年度中間年報 平成20年度先端的SoC製造システム高度制御技術開発
公開日2009/4/24
報告書年度2008 - 2008
委託先名株式会社半導体先端テクノロジーズ
プロジェクト番号P07013
部署名電子・情報技術開発部
和文要約以下本編抜粋:研究開発項目1「SoC製造統合制御システム技術の研究開発」ウェーハ単位の制御により、製造プロセス全体をリアルタイムで統合的に制御し、コスト、TAT(Turn Around Time)、歩留まり等に関し総合最適化を図ることができる統合制御システムの研究開発に関し、以下の成果を得た。
英文要約[1] Integrated control system technology for SoC production: (1) Based on an analysis of operation flow of wafer-by-wafer control, the functional requirement document is developed describing roles of control function of equipment, process, process step, and quality. Prototype base functions are developed and the system structure and equipment control base model are verified. (2) Based on the control method in order to deal with disturbance of fab productivity such as interruptive operation, required functions of system are determined and TAT reduction effect is verified by using fab simulator. (3) Based on fab operation analysis, basic functional requirement and data structure are defined. Prototyping of cost trial calculation function is performed to define functional requirement and resulted in fab operation being effectively performed. By referring design guideline document described in item (5) below, higher software reusability is obtained. (4) Operations to maintain and improve product quality and equipment quality are defined, and to-be operation flow is defined as base functional requirement of control system to enable improve production capability such as cost, TAT, and yield. Using the definition, relation of elements of control system is determined and functional requirement document is developed. (5) Functional requirements of standardization, implementation and visualization technologies which are essential to realize functions (1) to (5) described above are determined. Guideline document describing standardization method is developed. (6) Wafer manufacturing cycle time, waiting state, and cycle time composition model are defined. Wafer processing cycle time consists of 4 tiers of wafer manufacturing, operation step group processing, equipment process and equipment subsystem process. Waiting state consists of 3 stats of waiting for manufacturing order, waiting for capacity consumption, and waiting for manufacturing. Management indicator is defined using these 3 waiting status and the definition is proposed as preliminary technical ballot of SEMI standard. [2] Quality control system technology for SoC: (1) Functional requirement of overall equipment control system including wafer logistics and quality information is brought out and a requirement document describing required functions expected to be installed on equipment is developed. (2) A sampling tool to efficiently perform sampling related operations such as sampling frequency and estimation of effectiveness is developed. [3] Control system implementation technology for SoC production: (1) A fab model expected to install developed systems is constructed and necessary data, such as rot processing result and equipment usage to evaluate prototype of cost trial calculation function is prepared. Production simulation model is developed and appropriate values of cost per wafer and TAT per mask which are representative index of fab productivity.
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