成果報告書詳細
管理番号20100000001161
タイトル*平成21年度中間年報 先端的SoC製造システム高度制御技術開発
公開日2010/11/10
報告書年度2009 - 2009
委託先名株式会社半導体先端テクノロジーズ
プロジェクト番号P07013
部署名電子・情報技術開発部
和文要約和文要約等以下本編抜粋:1.研究開発の内容及び成果等 平成21年度の研究開発実績を、以下、本事業の平成21年度実施方針に記載された研究開発項目別に記す。 研究開発項目(1)「SoC製造統合制御システム技術の研究開発」 ウェーハ単位の制御により、製造プロセス全体をリアルタイムで統合的に制御し、コスト、TAT(Turn Around Time)、歩留まり等に関し総合最適化を図ることができる統合制御システムの研究開発に関し、以下の成果を得た。 (1)平成20年度までに考案した工場の生産性を阻害する割り込み処理等の擾乱対処の要求を実現する制御方式と、システムの持つべき機能(ウェーハ連続供給、条件切り替え削減等)に基づき、制御機能の実装方法について検討した。図1に実装機能構成図を示す。自動ラインで種々の形態で実装されているディスパッチャ/製造実行システム(MES: Manufacturing Execution System)に対する着工順序・タイミング指示機能として本制御機能を実装する事で、実ラインへの適用性を確保した。
英文要約1] Integrated control system technology for SoC production: (1) Implementation design of control functions is developed. The control functions are implemented into the system as functions of lot operation sequence determination and timing control to dispatcher and/or MES (Manufacturing Execution System) which are implemented in various ways in the automated manufacturing line so as to ensure applicability to actual production lines. (2) The prototyping of cost trial calculation function is evaluated by assumed end-users. Data structure of material cost related to NPW (Non Product Wafer) and customization capability of cost calculation formula by end-users are added to the functional requirements. As for the former data structure, material cost data consists of history data of usage of NPW, equipment cost, and product cost is structured and componentized. As for the latter customization capability, cost calculation logic is componentized and the software structure is designed to enable end-users to form cost calculation formula. (3) System design of control system to enable improvement of production performance of cost, TAT (Turn Around Time), yield, and so forth, and partial development of control function are completed. Independent and uncoordinated system structure of existing APC (Advanced Process Control), SPC (Statistical Process Control), and FDC (Fault Detection and Classification) is separated and restructured into major three functions of product quality system, equipment quality system, and external interface. The control system is designed to realize unified control under cooperation of these functions. (4) The application design guideline is actually applied to system development. Items to be improved are clarified and the guideline is partially revised. [2] Quality control system technology for SoC: Operation and management model of the inspection sampling tool and the control system described in above paragraph [1] (3). Management task of process step quality to perform quality control is divided into two tasks, control task of process step quality to design control method in order to keep and improve quality, and control task of wafer processing to control and judge processing result under indicated control method. By coordinating these tasks with the development tasks of data pre-processing algorism, control algorism, and judgment algorism, management task model is developed to realize efficient control system operation and management. [3] Control system implementation technology for SoC production: Based on the requirement document developed in FY2009 which defined the model of the factory with assumed system implementation and required data to evaluate prototype of cost trial calculation function, evaluation condition is determined. The major evaluation conditions are cost per wafer and per mask of the existing and target factory models.
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