成果報告書詳細
管理番号20100000001163
タイトル*平成21年度中間年報 超高密度ナノビット磁気記録技術の開発(グリーンITプロジェクト)
公開日2011/1/18
報告書年度2009 - 2009
委託先名株式会社日立製作所 株式会社日立グローバルストレージテクノロジーズ 株式会社東芝
プロジェクト番号P08010
部署名電子・情報技術開発部
和文要約和文要約等以下本編抜粋:研究開発項目(1)「超高密度ナノビット磁気媒体技術の研究開発」 (1)ナノビット微細加工技術の研究開発(株式会社東芝、株式会社日立製作所)株式会社東芝 ・自己組織化マスクと共存するサーボパターンを設計し、1Tb/in2(30nmピッチ)のCoPtビットパターンド媒体を作製・評価した。2.5Tb/in2(17nmピッチ)の自己組織化材料の設計を完了した。 ・再委託先の群馬大学では、自己組織化ポリマーの配列乱れを少なくする制御構造を設計し、設計どおりのパターンができることを電子線描画により実証した。 株式会社日立製作所・高偏析系高分子ブロック共重合体を開発し、1.0-4.2Tb/in2相当のドットパタン形成が可能であることを確認した。また、ガイドを用いた配列制御の可能性の検討を行い5Tb/in2級が視野に入ることを確認した。
英文要約Title: Development of Nanobit Technology for Ultra-high Density Magnetic Recording (Green IT Project) FY2009 Annual Report
This project aims to establish ultra-high density magnetic recording technology, which leads to reducing the number of HDDs installed in a data center. The project covers all the key technologies for ultra high-density HDD, such as media, head and addressing technologies. The developed elemental technologies will be integrated and the feasibility will be demonstrated by the end of the project. In fiscal year 2009, quantitative study was started based on the evaluation and fabrication equipments being prepared from 2008. There were some remarkable achievements to lead worldwide industries. Head integration technology for 2.5Tb/in2-class thermally-assisted recording was one of them. The abstract of the results of the research in fiscal year 2009 are as follows. (1) Ultra-high density nano-bit media: Self-assembly polymer materials which realize 1.0 to 4.2 Tb/in2 dot pattern were developed. It was confirmed that the ion-poisoning method, an alternative patterning technology, has a technical potential toward 2.5Tb/in2-class bit-patterning. Fabrication process of high anisotropy FePt ordered alloy was developed. For thermally-assisted recording, a technical advantage of a heat-insurance layer was confirmed. Thermal durability of lubricant and overcoat material was studied with molecular dynamics simulations and heating experiments: FCAC showed the best performance. (2) High performance magnetic head: Fabrication process to realize both-side-tapered pole was established. For energy assisting, precise fabrication process, which integrates a near-field optical element beside a magnetic pole, was developed. The fabricated near-field element has a tip curvature of less than 10 nm. For realizing narrow track sensor, 30-nm-class precise fabrication process was developed. The function of fabricated near-field elements was verified with newly introduced static tester system. (3) High accuracy nano-addressing: Servo performance of fabricated bit patterned media was evaluated with newly configured evaluation system and the technical issues to realize 5Tb/in2 were abstracted. For precise positioning, thermal actuator to actuate a head slider was designed and being fabricated. Servo system specifications to realize 2.5Tb/in2 including targets specifications for actuator was designed. Simulation system was developed to evaluate the effect of flow-induced vibrations. (4) HDD system: Macro-specifications to realize 2.5Tb/in2 were designed. Combination of optical, thermal and magnetic simulations revealed that the fabricated near-field element would realize 2.5 Tb/in2-class thermally-assisted recording. Energy consumption of thermal-assist-type HDD was estimated under assumption of PC environment: power increase is negligible. Combined study of nanobit media design, head design, fabrication, read/write, and addressing evaluations clarified the development directions to achieve 2.5Tb/in2.
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