本文へジャンプ

成果報告書詳細
管理番号20180000000171
タイトル*平成29年度中間年報 高輝度・高効率次世代レーザー技術開発 次々世代加工に向けた新規光源・要素技術開発 高効率加工用GaN系高出力・高ビーム品質半導体レーザーの開発
公開日2018/6/26
報告書年度2017 - 2017
委託先名パナソニック株式会社 パナソニックスマートファクトリーソリューションズ株式会社
プロジェクト番号P16011
部署名IoT推進部
和文要約
英文要約Title: Development of advanced laser processing with Intelligence based on high-brightness and high-efficiency next-generation laser technologies (TACMI project). Development of GaN-based high-power and high-beam quality laser diodes for high-efficiency laser processing (FY2016-FY2020) FY2017Annual Report

The target of this theme is a realization of GaN-based semiconductor lasers which enables both high-power and high beam quality operation for laser processing. Progress in FY 2017 is as follows.
(1)GaN laser array
Based on device parameters (cavity length, emitter spacing/width, etc.) designed in FY 2016, GaN laser arrays were fabricated with 20 emitters in a one-chip. Metal double heat-flow structure is applied for heat dissipation, leading to thermal resistance of 0.53 K/W. The array exhibits the continuous-wave optical output of more than 80 W under 25 °C,which exceeds the target power of this theme.
In general, a high-power diode laser utilizes a wide-strip emitter, which does not cut off the higher-order transverse modes, leading the beam quality deterioration. To improve the quality, the control method of transverse mode has developed. Moreover, built-in wavelength-control structures have been studied for simplified optical system of spectral beam combining. It is indicated that optimization of filling factor of high-order grating in a diode laser enables sufficient feedback for wavelength-control.
(2) GaN laser module
A chip-submount / submount-package assembling machine was introduced, which enables precise assembling alignment using an edge detection method and fine junction quality by tool-position/weight control.
To suppress the emission-point bowing, heat-transfer from a chip is important. Our original idea of high-heat-dissipation through an array substrate is shown not to be effective using a heat analysis. Thus, cooling configuration of the module is to be changed from one-side to both-sides cooling, which could satisfy low-bowing requirements.
(3) Beam-twister unit (BTU)
A BTU consists of a fast-axis collimator lens (FAC) and a beam-twister lens (BT). We have designed a BTU structure for GaN-laser oscillation wavelength range, giving the estimated characteristics using ray-tracing or beam synthesis propagation method as follows.
1) Aspherical troid surface for the FAC output side enables superior aberration value lower than Marechal's criterion, which means no aberration.
2) A laser beam, which is incident to a BT, rotate in 90 degree without cross-talks between neighboring laser beams from a laser array.
3) Divergent angle of a laser beam from a BTU meets the specification for a spectral beam combining.
ダウンロード成果報告書データベース(ユーザ登録必須)から、ダウンロードしてください。

▲トップに戻る