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成果報告書詳細
管理番号20190000000470
タイトル*平成30年度中間年報 戦略的イノベーション創造プログラム(SIP)第2期/フィジカル空間デジタルデータ処理基盤/サブテーマII:超低消費電力IoTデバイス・革新的センサ技術/常温発電IoT環境センサの研究開発
公開日2019/6/6
報告書年度2018 - 2018
委託先名国立大学法人東北大学 三井化学株式会社
プロジェクト番号P18014
部署名IoT推進部
和文要約
英文要約Title: Strategic Innovation Promotion Program (SIP), the 2nd period/ Intelligent Knowledge Processing Infrastructure Integrating Physical and Virtual Domains/ Technologies for innovative sensors and low-energy loT chips (sub theme II)/ Smart IoT environment sensors with a thermal harvester at ordinary temperatures (FY2018-FY2020) FY2018 Annual Report.

1. Smart IoT sensor system (Tohoku University)
Battery-free smart IoT micro sensors have been developed. The micro sensor consists of a thermal energy harvester, super capacitor, IoT sensor and wireless front end. The thermal energy harvester using a thermoelectric unit can produce a power from environment temperature fluctuation using a thermal management microsystem. The thermal management system utilizes micro thermal capacitor and micro heat exchanger. Followings have been developed and achieved.
2. Development of a battery-free IoT sensor platform (Tohoku University)
A battery-free IoT sensor platform, which can apply to various IoT sensors, has been designed on the basis of performances of the developed micro-thermoelectric harvester and film-type super capacitor. The system consists of a charge pump circuit, DC-DC converter, timer, and RF front end. Also a wireless communication system with a 900 MHz band range is developed.
3. Development of thermal energy harvester device and materials (Tohoku University and MEMS CORE Co., Ltd.)
The materials and microfabrication process of the thermal energy harvester device have been developed. The thermal energy device based on thermoelectric power generation utilizes BiTe (n-type) and BiSb (p-type) material systems. The microfabrication process of these materials and nanomaterial composites have been investigated and developed. Thick film deposition technology of both materials using electrodeposition can be achieved for the device developments.
4. Developments of micro super capacitor (Tohoku University)
In order to achieve a higher charging capacitance, gaining the electrode surface is an effective method. Electrodes consist of silicon nanowires coated with graphene nanowall have been fabricated and it is found that the charging capacitance becomes double of that of a planar structure.
5. Smart IoT molecule sensors (Mitsui Chemicals, Inc)
A micro gas sensor with a functional stress generator made of a Si-polymer composite has been developed. It is estimated that the functional layer of the Si-polymer composite generates stress due to gas molecules absorbed in the composite, which exert external stress to a bridged Si resonator. We suggested this phenomenon occurred as a result of "sorption model", and verified a trace gas would cause an expansion of polymer layer, which results in stress generation.
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