Atonarp, Inc.
Advanced mass spectrometry sensors for real-time, automated control in semiconductor fabs
As of July, 2025
| City | Year of Establishment | Founder |
|---|---|---|
| Minato-ku, TOKYO | 2009 | Prakash, Murthy |
| Partner VC | Latest round of Fundraising | Valuation |
|---|---|---|
| - | Series 1 | JPY 3,000 million |
- Contact Information: 03-6435-6234
- yasuyuki.takezoe@atonarp.com
- Website: Atonarp, Inc.
Program name
Deep-Tech Startups Support Program
Research theme
Advanced mass spectrometry sensors for real-time, automated control in semiconductor fabs
Business Plan
We empower semiconductor equipment makers and fabs with compact, high-performance quadrupole sensors for real-time process monitoring, along with advanced mass spectrometry analytics that enable automatic recipe generation and correction through data-driven software tools—boosting manufacturing precision, efficiency, and competitiveness.
Research Outline
To ensure successful adoption in high-volume manufacturing environments at leading semiconductor equipment makers, the following initiatives will be undertaken:
- Define and refine specifications by gathering detailed requirements from equipment makers.
- Develop a commercial prototype (beta version) of the Aston Integrated system.
- Conduct evaluations with potential customers to iteratively enhance the solution and meet target specifications by the end of the grant period.
- Initiate development of AI-powered data analysis capabilities based on initial specifications, enabling automated insights and learning-driven optimization.
| Phase | Business Area/Field | Research Period | Research Grant Amount |
|---|---|---|---|
| PCA | Information & Communication | 2025-2026FY | JPY 422 million |
International collaborative technology demonstration
| Countries/Regions | Collaborative activity outline |
|---|---|
| United States |
|
Last Updated : November 14, 2025