AirMembrane Corp.
Development of an ultra-high-transmittance, highly durable EUV pellicle using multi-layer graphene
As of December,2025
| City | Year of Establishment | Founder |
|---|---|---|
| Tsukuba, Ibaraki | 2017 | Yoshinori Koga Masataka Hasegawa |
| Partner VC | Latest round of Fundraising | Valuation |
|---|---|---|
| — | Pre Series A | JPY 1,000 million |
- Contact Information:
- tel : 029-869-6551
fax : 029-869-6552 - Website: AirMembrane Corp.
Program name
Deep-Tech Startups Support Program in the Green Transformation field
Research theme
Development of an ultra-high-transmittance, highly durable EUV pellicle using multi-layer graphene
Research Outline
By applying an ultra-thin multi-layer graphene film to the EUV pellicle, a core component of semiconductor lithography equipment, this proposal reduces equipment power consumption by 1-3% and reduces wafer waste due to yield loss. This will reduce power demand in all digital infrastructure, including data centers and AI accelerators, accelerating GX (Green Transformation).
| Phase | Business Area/Field | Research Period | Research Grant Amount |
|---|---|---|---|
| STS | Materials | 2025-2027 FY | JPY 293 million |
Last Updated : April 21, 2026